Tsutomu Tanaka
343Patents
41h-index
415Co-inventors
93Inventor score
Filing activity: Apr 30, 1976 → Jun 27, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6329297A | Dilute remote plasma clean | Emerging Cross-Sectional Technologies | 653 | Expired |
| US6863019B2 | Semiconductor device fabrication chamber cleaning method and apparatus with recirculation of cleaning gas | Emerging Cross-Sectional Technologies | 549 | Expired |
| US5821731A | Connection system and connection method for an electric automotive vehicle | Emerging Cross-Sectional Technologies | 489 | Expired |
| US6447651B1 | High-permeability magnetic shield for improved process uniformity in nonmagnetized plasma process chambers | Chemistry; Metallurgy | 471 | Expired |
| US5844195A | Remote plasma source | Electricity | 321 | Expired |
| US5465525A | Intellectual working robot of self controlling and running | Emerging Cross-Sectional Technologies | 222 | Expired |
| US9397380B2 | Guided wave applicator with non-gaseous dielectric for plasma chamber | Electricity | 191 | Active |
| US7244474B2 | Chemical vapor deposition plasma process using an ion shower grid | Chemistry; Metallurgy | 178 | Expired |
| US6039834A | Apparatus and methods for upgraded substrate processing system with microwave plasma source | Electricity | 177 | Expired |
| US7291360B2 | Chemical vapor deposition plasma process using plural ion shower grids | Chemistry; Metallurgy | 177 | Expired |
| US7695590B2 | Chemical vapor deposition plasma reactor having plural ion shower grids | Electricity | 177 | Expired |
| US5850135A | Connecting system and a connection method | Emerging Cross-Sectional Technologies | 167 | Expired |
| US5610841A | Video server | Electricity | 142 | Expired |
| US5140417A | Fast packet transmission system of video data | Electricity | 134 | Expired |
| US5995341A | Magnetic disk drive recording a signal with a skew angle | Physics | 113 | Expired |
| US4822990A | Admission control system having a transponder actuated by an inquiry signal | Emerging Cross-Sectional Technologies | 91 | Expired |
| US4498730A | Optical switching device | Physics | 89 | Expired |
| US5017766A | Portable electronic apparatus capable of confirming validity of transaction data | Physics | 74 | Expired |
| US6045618A | Microwave apparatus for in-situ vacuum line cleaning for substrate processing equipment | Emerging Cross-Sectional Technologies | 70 | Expired |
| US6079426A | Method and apparatus for determining the endpoint in a plasma cleaning process | Emerging Cross-Sectional Technologies | 67 | Expired |
| US7146631B1 | Content providing system and terminal used therein | Electricity | 61 | Expired |
| US5816643A | Charge coupling for electric vehicle | Emerging Cross-Sectional Technologies | 60 | Expired |
| US5458496A | Charge coupling for electric vehicle | Emerging Cross-Sectional Technologies | 57 | Expired |
| US6348126B1 | Externally excited torroidal plasma source | Electricity | 56 | Expired |
| US6239553A | RF plasma source for material processing | Electricity | 54 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.