Vikki S. Simpson
3Patents
3h-index
18Co-inventors
43Inventor score
Filing activity: Jan 19, 1993 → Aug 1, 1997
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5595522A | Semiconductor wafer edge polishing system and method | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5424224A | Method of surface protection of a semiconductor wafer during polishing | Emerging Cross-Sectional Technologies | 18 | Expired |
| US6028006A | Method for maintaining the buffer capacity of siliceous chemical-mechanical silicon polishing slurries | Performing Operations; Transporting | 12 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.