Inventor · Orinda, CA, US

William Oldham

10Patents
6h-index
11Co-inventors
63Inventor score

Filing activity: Feb 10, 1976 → Mar 31, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US5233460A Method and means for reducing speckle in coherent laser pulses Physics 104 Expired
US4013489A Process for forming a low resistance interconnect in MOS N-channel silicon gate integrated circuit Emerging Cross-Sectional Technologies 21 Expired
US7075699B2 Double hidden flexure microactuator for phase mirror array Physics 18 Expired
US9029813B2 Filter for material supply apparatus of an extreme ultraviolet light source Electricity 9 Active
US4396996A Monolithic static memory cell and method for its operation Physics 8 Expired
US8075732B2 EUV collector debris management Performing Operations; Transporting 7 Expired
US4441036A Monolithically integrated circuit with connectible and/or disconnectible circuit portions Electricity 6 Expired
US4450537A Monolithically integrated read-only memory Physics 4 Expired
US7141806B1 EUV light source collector erosion mitigation Electricity 4 Expired
US9669334B2 Material supply apparatus for extreme ultraviolet light source having a filter constructed with a plurality of openings fluidly coupled to a plurality of through holes to remove non-target particles from the supply material Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.