Woosung Han
3Patents
1h-index
9Co-inventors
37Inventor score
Filing activity: Oct 8, 2002 → Jun 29, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6818384B2 | Methods of fabricating microelectronic features by forming intermixed layers of water-soluble resins and resist materials | Emerging Cross-Sectional Technologies | 3 | Expired |
| US7431855B2 | Apparatus and method for removing photoresist from a substrate | Emerging Cross-Sectional Technologies | 1 | Expired |
| US9786486B2 | Parallel multi wafer axial spin clean processing using spin cassette inside movable process chamber | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.