Yanfu Lu
3Patents
0h-index
7Co-inventors
21Inventor score
Filing activity: May 12, 2021 → Mar 17, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12163227B2 | Film deposition systems and methods | Electricity | 0 | Active |
| US11959173B2 | Methods of forming structures, semiconductor processing systems, and semiconductor device structures | Electricity | 0 | Active |
| US12057314B2 | Methods for silicon germanium uniformity control using multiple precursors | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.