Yebin Nam
3Patents
0h-index
13Co-inventors
28Inventor score
Filing activity: Apr 2, 2021 → May 23, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11415891B2 | Extreme ultraviolet light source system | Electricity | 0 | Active |
| US12298676B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11304287B1 | Extreme ultraviolet light source systems | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.