Inventor · Daegu, KR

Yeon-Jin Gil

5Patents
2h-index
12Co-inventors
40Inventor score

Filing activity: Jun 22, 2015 → Mar 29, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9704864B2 Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin Electricity 8 Active
US10985036B2 Substrate processing apparatus and apparatus for manufacturing integrated circuit device Electricity 3 Active
US10128246B2 Semiconductor devices including an isolation layer on a fin and methods of forming semiconductor devices including an isolation layer on a fin Electricity 2 Active
US11887868B2 Substrate processing apparatus and apparatus for manufacturing integrated circuit device Electricity 0 Active
US10818522B2 Process chamber for a supercritical process and apparatus for treating substrates having the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.