Young-bum Koh
11Patents
5h-index
9Co-inventors
51Inventor score
Filing activity: Jan 2, 1997 → May 21, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5789360A | Cleaning solution for use on a semiconductor wafer following chemical-mechanical polishing of the wafer and method for using same | Chemistry; Metallurgy | 25 | Expired |
| US5851727A | Photosensitive polymers and photoresist compositions containing the same | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6092539A | In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6043206A | Solutions for cleaning integrated circuit substrates | Chemistry; Metallurgy | 7 | Expired |
| US6103845A | Chemically amplified resist polymers | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6114084A | Chemically amplified resist composition | Physics | 5 | Expired |
| US6171754A | Chemically amplified resist compositions | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6280903A | Chemically amplified resist composition | Physics | 4 | Expired |
| US6277204A | Methods for cleaning wafers used in integrated circuit devices | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6416927B1 | Chemically amplified resist compositions | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6713229B2 | Terpolymer for amplified resist | Emerging Cross-Sectional Technologies | 1 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.