Yuji SESHIMO
4Patents
0h-index
12Co-inventors
31Inventor score
Filing activity: Jul 6, 2018 → Sep 14, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12371784B2 | Gas management method and substrate processing system | Chemistry; Metallurgy | 0 | Active |
| US11905595B2 | Film deposition apparatus and film deposition method | Chemistry; Metallurgy | 0 | Active |
| US12205817B2 | Method for depositing film and film deposition system | Electricity | 0 | Active |
| US10734221B2 | Method of manufacturing semiconductor device and method of forming metal oxide film | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.