Yuko Iwabuchi
14Patents
6h-index
12Co-inventors
59Inventor score
Filing activity: Mar 13, 1996 → Feb 6, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5894124A | Scanning electron microscope and its analogous device | Electricity | 28 | Expired |
| US6348690B1 | Method and an apparatus of an inspection system using an electron beam | Electricity | 25 | Expired |
| US6452178B2 | Method and an apparatus of an inspection system using an electron beam | Electricity | 12 | Expired |
| US6541771B2 | Scanning electron microscope | Electricity | 8 | Expired |
| US6580074B1 | Charged particle beam emitting device | Electricity | 8 | Expired |
| US5668372A | Scanning electron microscope and its analogous device | Electricity | 6 | Expired |
| US6512227B2 | Method and apparatus for inspecting patterns of a semiconductor device with an electron beam | Electricity | 5 | Expired |
| US6987265B2 | Method and an apparatus of an inspection system using an electron beam | Electricity | 5 | Expired |
| US6225628A | Scanning electron microscope | Electricity | 4 | Expired |
| US7012252B2 | Method and an apparatus of an inspection system using an electron beam | Electricity | 3 | Expired |
| US7439506B2 | Method and an apparatus of an inspection system using an electron beam | Electricity | 2 | Active |
| US8134125B2 | Method and apparatus of an inspection system using an electron beam | Electricity | 0 | Active |
| US8604430B2 | Method and an apparatus of an inspection system using an electron beam | Electricity | 0 | Active |
| US7232996B2 | Method and an apparatus of an inspection system using an electron beam | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.