Inventor · Mito, JP

Yuko Iwabuchi

14Patents
6h-index
12Co-inventors
59Inventor score

Filing activity: Mar 13, 1996 → Feb 6, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US5894124A Scanning electron microscope and its analogous device Electricity 28 Expired
US6348690B1 Method and an apparatus of an inspection system using an electron beam Electricity 25 Expired
US6452178B2 Method and an apparatus of an inspection system using an electron beam Electricity 12 Expired
US6541771B2 Scanning electron microscope Electricity 8 Expired
US6580074B1 Charged particle beam emitting device Electricity 8 Expired
US5668372A Scanning electron microscope and its analogous device Electricity 6 Expired
US6512227B2 Method and apparatus for inspecting patterns of a semiconductor device with an electron beam Electricity 5 Expired
US6987265B2 Method and an apparatus of an inspection system using an electron beam Electricity 5 Expired
US6225628A Scanning electron microscope Electricity 4 Expired
US7012252B2 Method and an apparatus of an inspection system using an electron beam Electricity 3 Expired
US7439506B2 Method and an apparatus of an inspection system using an electron beam Electricity 2 Active
US8134125B2 Method and apparatus of an inspection system using an electron beam Electricity 0 Active
US8604430B2 Method and an apparatus of an inspection system using an electron beam Electricity 0 Active
US7232996B2 Method and an apparatus of an inspection system using an electron beam Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.