Scanning electron microscope and its analogous device
US5668372A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 13, 1996 |
| Grant date | Sep 16, 1997 |
| Priority date | — |
| Expiry date | Mar 13, 2016 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/15
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A device enables high resolution observation even when a sample is tiled. A deflecting electrode device for generating an electric field having a component in the direction perpendicular to the center axis (optical axis) of an objective lens is provided between the objective lens and the sample. A voltage applied to the deflecting electrode device is controlled in accordance with the tilting of a sample stage. A lateral electric field component generated on the optical axis when the sample stage is tiled is corrected by a deflected electric field generated by the deflecting electrode device. This is effective to suppress generation of astigmatism, and to allows effective arrival of an secondary electron at a secondary electron detector disposed at a position nearer the electron source side than the objective lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.