System and method for forming a sealed chamber

US10056274B2 · kind B2 · utility

Assignee

• Applied Materials Israel Ltd. · IL

Inventors

• Michael R. Rice · Pleasanton, US
• Paul B. Reuter · Austin, US
• William (Ty) Weaver · Austin, US
• Travis Morey · Austin, US
• Natan Schlimoff · Rehovot, IL
• Igor Krivts (Krayvitz) · Rehovot, IL
• Israel Avneri · Ramat Gan, IL
• Yoram Uziel · Yodfat, IL
• Erez Admoni · Netanya, IL

Key dates

• Filing date: Feb 10, 2016
• Grant date: Aug 21, 2018
• Expiry date: Feb 10, 2036

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/68714
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

According to an embodiment of the invention, there is provided a system, comprising: a first chamber; a second chamber; a chuck; a movement system; wherein the first chamber comprises: a first element that has a first surface; a first chamber housing that comprises a second surface; wherein the first surface and the second surface come into proximity with each other at a first interface; a supporting element for supporting the chuck when the chuck is positioned within the first chamber; and a first dynamic seal formed at the first interface and is arranged to seal the first chamber from the movement system; wherein the second chamber comprises: a second chamber housing; a movement system that is arranged to introduce movement between (a) the first chamber housing and (b) the first element and the chuck; and a movement control element for mechanically coupling the first element to the movement system.