Inventor · Austin, TX, US

Travis Morey

15Patents
3h-index
31Co-inventors
56Inventor score

Filing activity: Oct 2, 2009 → Nov 8, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8293016B2 Apparatus for efficient removal of halogen residues from etched substrates Emerging Cross-Sectional Technologies 536 Active
USD973737S1 Mainframe of substrate processing system General 4 Active
USD973116S1 Mainframe of substrate processing system General 4 Active
US9441792B2 Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods Emerging Cross-Sectional Technologies 3 Active
US10119191B2 High flow gas diffuser assemblies, systems, and methods Electricity 2 Active
USD991994S1 Mainframe of substrate processing system General 2 Active
USD992611S1 Mainframe of substrate processing system General 2 Active
US10278501B2 Load lock door assembly, load lock apparatus, electronic device processing systems, and methods Electricity 2 Active
US8486194B2 Apparatus for efficient removal of halogen residues from etched substrates Emerging Cross-Sectional Technologies 2 Active
US10056274B2 System and method for forming a sealed chamber Electricity 1 Active
USD1029066S1 Mainframe of dual-robot substrate processing system General 1 Active
US10381247B2 Gas systems and methods for chamber ports Emerging Cross-Sectional Technologies 0 Active
USD1076836S1 Mainframe with integrated lid General 0 Active
US10758045B2 Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods Electricity 0 Active
US9435025B2 Gas apparatus, systems, and methods for chamber ports Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.