Travis Morey
15Patents
3h-index
31Co-inventors
56Inventor score
Filing activity: Oct 2, 2009 → Nov 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8293016B2 | Apparatus for efficient removal of halogen residues from etched substrates | Emerging Cross-Sectional Technologies | 536 | Active |
| USD973737S1 | Mainframe of substrate processing system | General | 4 | Active |
| USD973116S1 | Mainframe of substrate processing system | General | 4 | Active |
| US9441792B2 | Transfer chamber gas purge apparatus, electronic device processing systems, and purge methods | Emerging Cross-Sectional Technologies | 3 | Active |
| US10119191B2 | High flow gas diffuser assemblies, systems, and methods | Electricity | 2 | Active |
| USD991994S1 | Mainframe of substrate processing system | General | 2 | Active |
| USD992611S1 | Mainframe of substrate processing system | General | 2 | Active |
| US10278501B2 | Load lock door assembly, load lock apparatus, electronic device processing systems, and methods | Electricity | 2 | Active |
| US8486194B2 | Apparatus for efficient removal of halogen residues from etched substrates | Emerging Cross-Sectional Technologies | 2 | Active |
| US10056274B2 | System and method for forming a sealed chamber | Electricity | 1 | Active |
| USD1029066S1 | Mainframe of dual-robot substrate processing system | General | 1 | Active |
| US10381247B2 | Gas systems and methods for chamber ports | Emerging Cross-Sectional Technologies | 0 | Active |
| USD1076836S1 | Mainframe with integrated lid | General | 0 | Active |
| US10758045B2 | Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods | Electricity | 0 | Active |
| US9435025B2 | Gas apparatus, systems, and methods for chamber ports | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.