Patent · US Active

Beam distributing optical device and associated unit, system and apparatus

US10061203B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Deguenther · Aalen, DE
Michael Patra · Oberkochen, DE
Thomas Korb · Schwäbisch Gmünd, DE

Key dates

Filing date	Aug 23, 2016
Grant date	Aug 28, 2018
Priority date	—
Expiry date	Aug 23, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70208
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A beam distribution optical unit serves for splitting an incident beam of illumination light into at least two emergent illumination-light beams. The beam distribution optical unit has at least one blazed reflection grating having reflective grating structures. The result is an optical unit in which a plurality of illumination-light beams are efficiently produced from one incident beam of illumination light.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.