Patent · US Active

Charged particle optical apparatus for through-the lens detection of particles

US10068744B2 · kind B2 · utility

4Cited by

10References

11Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Erik Essers · Aalen, DE
Michael Albiez · Aalen, DE
Stefan Meyer · Langensendelbach, DE
Daniel Kirsten · Wulfen, DE
Stewart Bean · St Ives, GB

Key dates

Filing date	Dec 1, 2015
Grant date	Sep 4, 2018
Priority date	—
Expiry date	Jun 7, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2608
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.