Edge flow element for electroplating apparatus

US10094034B2 · kind B2 · utility

Assignee

• Lam Research Corporation · US

Inventors

• Gabriel Hay Graham · Portland, US
• Bryan L. Buckalew · Tualatin, US
• Steven T. Mayer · Lake Oswego, US
• Robert Rash · Portland, US
• James Isaac Fortner · Greenville, US
• Lee Peng Chua · Beaverton, US

Key dates

• Filing date: Oct 27, 2015
• Grant date: Oct 9, 2018
• Expiry date: Jul 7, 2036

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C25D17/008
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

The embodiments herein relate to methods and apparatus for electroplating one or more materials onto a substrate. In many cases the material is a metal and the substrate is a semiconductor wafer, though the embodiments are no so limited. Typically, the embodiments herein utilize a channeled plate positioned near the substrate, creating a cross flow manifold defined on the bottom by the channeled plate, on the top by the substrate, and on the sides by a cross flow confinement ring. Also typically present is an edge flow element configured to direct electrolyte into a corner formed between the substrate and substrate holder. During plating, fluid enters the cross flow manifold both upward through the channels in the channeled plate, and laterally through a cross flow side inlet positioned on one side of the cross flow confinement ring. The flow paths combine in the cross flow manifold and exit at the cross flow exit, which is positioned opposite the cross flow inlet. These combined flow paths and the edge flow element result in improved plating uniformity, especially at the periphery of the substrate.