Patent · US Active

Multi-step surface passivation structures and methods for fabricating same

US10096702B2 · kind B2 · utility

3Cited by
2References
24Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMay 31, 2017
Grant dateOct 9, 2018
Priority date
Expiry dateMay 31, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D62/343
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A gallium nitride (GaN) transistor which includes two or more insulator semiconductor interface regions (insulators). A first insulator disposed between the gate and drain (near the gate) minimizes the gate leakage and fields near the gate that cause high gate-drain charge (Qgd). A second insulator (or multiple insulators), disposed between the first insulator and the drain, minimizes electric fields at the drain contact and provides a high density of charge in the channel for low on-resistance.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.