Method of performing metrology operations and system thereof

US10120973B2 · kind B2 · utility

Assignee

• Applied Materials Israel Ltd. · IL

Inventors

• Ron Katzir · Nes Ziona, IL
• Imry Kissos · Kiryat Ono, IL
• Lavi Jacov Shachar · Nes Ziona, IL
• Amit Batikoff · Netanya, IL
• Shaul Cohen · Irus, IL
• Noam Zac · Kfar Sava, IL

Key dates

• Filing date: Mar 15, 2017
• Grant date: Nov 6, 2018
• Expiry date: Apr 7, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70616
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

There are provided system and method of performing metrology operations related to a specimen. The method comprises: accommodating definitions of metrology objects and metrology operations, at least one of the group consisting of the metrology objects and the metrology operations being defined using design data; accommodating a design-based representation and an image-based representation of the specimen, the design-based representation of the specimen comprising design-based representation of at least first metrology object, the image-based representation of the specimen comprising image-based representation of the at least first metrology object, the metrology operations including at least first metrology operation defined as related to the at least first metrology object and performed on at least the image-based representation of the specimen; mapping between the design-based representation and the image-based representation of the at least first metrology object; and performing the at least first metrology operation according to definition thereof using the mapping.