Patent · US Active

Charged particle beam system and method of operating the same

US10121635B2 · kind B2 · utility

2Cited by

5References

22Claims

0Family size

Assignees

Carl Zeiss Microscopy GmbH · DE
Applied Materials Israel Ltd. · IL

Inventors

Stefan Schubert · Oberkochen, DE
Thomas Kemen · Meppen, DE
Rainer Knippelmeyer · Utting am Ammersee, DE

Key dates

Filing date	Sep 30, 2014
Grant date	Nov 6, 2018
Priority date	—
Expiry date	Sep 30, 2034

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/047
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A method of operating a charged particle beam system, the method comprises extracting a particle beam from a source; performing a first accelerating of the particles of the beam; forming a plurality of particle beamlets from the beam after the performing of the first accelerating; performing a second accelerating of the particles of the beamlets; performing a first decelerating of the particles of the beamlets after the performing of the second accelerating; deflecting the beamlets in a direction oriented transverse to a direction of propagation of the particles of the beamlets after the performing of the first decelerating; performing a second decelerating of the particles of the beamlets after the deflecting of the beamlets; and allowing the particles of the beamlets to be incident on an object surface after the performing of the second decelerating.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.