Optical component

US10133183B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Michael Patra · Oberkochen, DE
• Markus Deguenther · Aalen, DE
• Paul Buettner · Aalen, DE
• Willi Heintel · Aalen, DE
• Henner Baitinger · Aalen, DE

Key dates

• Filing date: Sep 6, 2016
• Grant date: Nov 20, 2018
• Expiry date: Sep 6, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70116
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical component for a projection exposure apparatus includes a multiplicity of variably positionable beam-guiding elements which serve as pupil facets. The optical component can be arranged in the beam path of the projection optical unit.