Patent · US Active

Insulating gate separation structure and methods of making same

US10153209B1 · kind B1 · utility

4Cited by
2References
13Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 5, 2018
Grant dateDec 11, 2018
Priority date
Expiry dateFeb 5, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L21/32139
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

One illustrative integrated circuit product disclosed herein includes a first final gate structure, a second final gate structure and an insulating gate separation structure positioned between the first and second final gate structures. In this example, the insulating gate separation structure comprises an upper portion and a lower portion. The lower portion has a first lateral width in a first direction that is substantially uniform throughout a vertical height of the lower portion. The upper portion has a substantially uniform second lateral width in the first direction that is substantially uniform throughout a vertical height of the upper portion, wherein the second lateral width is less than the first lateral width.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.