Patent · US Active

Nanowire transistor with source and drain induced by electrical contacts with negative schottky barrier height

US10170627B2 · kind B2 · utility

5Cited by
88References
26Claims
0Family size

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Key dates

Filing dateNov 17, 2017
Grant dateJan 1, 2019
Priority date
Expiry dateNov 17, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/647
  • WIPO fieldMicro-structural and nano-technology
  • WIPO sectorChemistry

Abstract

A nanowire transistor includes undoped source and drain regions electrically coupled with a channel region. A source stack that is electrically isolated from a gate conductor includes an interfacial layer and a source conductor, and is coaxially wrapped completely around the source region, extending along at least a portion of the source region. A Schottky barrier between the source conductor and the source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.