Patent · US Active

Target retaining apparatus

US10199204B2 · kind B2 · utility

0Cited by

0References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Srinivasa Rao YEDLA · Kanchinakote, IN
Sundarapandian Ramalinga Vijayalakshmi REDDY · Kanchinakote, IN
Uday Pai · San Jose, US
Kirankumar Neelasandra SAVANDAIAH · Bengaluru, IN
Thanh X. Nguyen · San Jose, US
Muhammad M. Rasheed · San Jose, US
Jallepally Ravi · Santa Clara, US

Key dates

Filing date	Jan 20, 2015
Grant date	Feb 5, 2019
Priority date	—
Expiry date	Apr 23, 2036

Classification

Technology area (CPC H)Electricity
CPC primaryH01J37/3435
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Embodiments of target retaining apparatus and substrate processing chambers incorporating same are provided herein. In some embodiments, a target retaining apparatus includes a housing including a first slot and a second slot; a cam movably disposed in the housing, wherein movement of the cam is constrained along the first slot; a retaining arm movably coupled to the cam, wherein movement of the retaining arm is constrained along the second slot; a linking member including a first end rotatably coupled to the cam and a second end rotatably coupled to the retaining arm; and a biasing element biasing the cam towards a first position in which the retaining arm extends away from the housing.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.