Defect inspection device and defect inspection method
US10228332B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 22, 2015 |
| Grant date | Mar 12, 2019 |
| Priority date | — |
| Expiry date | Jan 25, 2035 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/121
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A defect inspection method includes irradiating a sample with laser, condensing and detecting scattered light beams, processing signals that detectors have detected and extracting a defect on a sample surface, and outputting information on the extracted defect. Detection of the scattered light beams is performed by condensing the scattered light beams, adjusting polarization directions of the condensed scattered light beams, mutually separating the light beams depending on the polarization direction, and detecting the light beams by a plurality of detectors. Extraction of the defect is performed by processing output signals from the detectors by multiplying each detection signal by a gain, discriminating between a noise and the defect, and detecting the defect.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.