Taketo Ueno
22Patents
4h-index
27Co-inventors
59Inventor score
Filing activity: Sep 6, 2002 → Jan 22, 2015
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6897956B2 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Electricity | 17 | Expired |
| US7369223B2 | Method of apparatus for detecting particles on a specimen | Physics | 14 | Active |
| US7881520B2 | Defect inspection system | Electricity | 6 | Active |
| US9535013B2 | Method and apparatus for inspecting defect | Physics | 4 | Active |
| US8681328B2 | Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatus | Physics | 3 | Active |
| US7271908B2 | Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device | Electricity | 3 | Expired |
| US8830465B2 | Defect inspecting apparatus and defect inspecting method | Physics | 3 | Active |
| US8660336B2 | Defect inspection system | Electricity | 3 | Active |
| US7643140B2 | Method and apparatus for inspecting a semiconductor device | Physics | 2 | Active |
| US7817261B2 | Method of apparatus for detecting particles on a specimen | Physics | 2 | Active |
| US10228332B2 | Defect inspection device and defect inspection method | Physics | 2 | Active |
| US9683946B2 | Method and device for detecting defects and method and device for observing defects | Physics | 2 | Active |
| US9182592B2 | Optical filtering device, defect inspection method and apparatus therefor | Physics | 2 | Active |
| US8275189B2 | Defect inspection system | Electricity | 1 | Active |
| US7952700B2 | Method of apparatus for detecting particles on a specimen | Physics | 1 | Active |
| US9019492B2 | Defect inspection device and defect inspection method | Physics | 1 | Active |
| US8885037B2 | Defect inspection method and apparatus therefor | Physics | 1 | Active |
| US8804112B2 | Method of defect inspection and device of defect inspection | Electricity | 1 | Active |
| US8970836B2 | Defect inspecting apparatus and defect inspecting method | Physics | 1 | Active |
| US8289507B2 | Method of apparatus for detecting particles on a specimen | Physics | 0 | Active |
| US9255793B2 | Defect inspection method and device thereof | Electricity | 0 | Active |
| US9588055B2 | Defect inspection apparatus and defect inspection method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.