Apparatus of plural charged-particle beams
US10236156B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2016 |
| Grant date | Mar 19, 2019 |
| Priority date | — |
| Expiry date | Jul 17, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2813
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.