Photonic crystal sensor structure and a method for manufacturing the same

US10247671B2 · kind B2 · utility

Assignee

• Infineon Technologies AG · DE

Inventors

• Jonathan Silvano de Sousa · Wien, AT
• Thomas Grille · Villach, AT
• Ursula Hedenig · Villach, AT
• Thomas Neidhart · Klagenfurt, AT
• Peter Irsigler · Ried im Innkreis, AT
• Vijaye Kumar Rajaraman · Villach, AT

Key dates

• Filing date: Feb 26, 2018
• Grant date: Apr 2, 2019
• Expiry date: Feb 26, 2038

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B2006/12166
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A sensor and methods of making a sensor are disclosed. The sensor may include a substrate including an opening, an optical source disposed in the substrate and configured to generate an optical source signal, an optical detector disposed in the substrate so that the opening is disposed between the optical source and the optical detector, a plurality of optical cavity structures disposed in the opening wherein each of the plurality of optical cavity structures contains an enclosed cavity so that the respective enclosed cavities are not in gas communication with each other, wherein the plurality of optical cavity structures are arranged in an optical path between the optical source and the optical detector, and a processing circuit coupled to the optical detector and configured to process an optical signal received by the optical detector.