Inventor · Villach, AT

Thomas Grille

33Patents
4h-index
52Co-inventors
62Inventor score

Filing activity: Dec 27, 2010 → Oct 13, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8575037B2 Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same Performing Operations; Transporting 16 Active
US9417186B2 Opto-electronic sensor Physics 9 Active
US10710874B2 Micromechanical structure and method for manufacturing the same Electricity 8 Active
US9363609B2 Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same Performing Operations; Transporting 5 Active
US9212045B1 Micro mechanical structure and method for fabricating the same Electricity 4 Active
US9511560B2 Processing a sacrificial material during manufacture of a microfabricated product Emerging Cross-Sectional Technologies 3 Active
US9702813B2 Sensing systems and methods using a coupling structure Physics 3 Active
US10345227B2 Sensing systems and methods using a coupling structure Physics 3 Active
US11320586B2 Bandpass transmission filter and narrowband radiation source Physics 2 Active
US9748140B1 Method of manufacturing semiconductor devices Electricity 2 Active
US10516943B2 Microelectromechanical device, an array of microelectromechanical devices, a method of manufacturing a microelectromechanical device, and a method of operating a microelectromechanical device Electricity 1 Active
US9610543B2 Method for simultaneous structuring and chip singulation Emerging Cross-Sectional Technologies 1 Active
US8871550B2 Method for processing a wafer at unmasked areas and previously masked areas to reduce a wafer thickness Performing Operations; Transporting 1 Active
US9618693B2 Liquid sensing systems and methods using a ring resonator sensor Physics 1 Active
US9903816B2 Photonic crystal sensor structure and a method for manufacturing the same Physics 1 Active
US11193885B2 Gas sensor Physics 1 Active
US10081533B2 Micromechanical structure and method for fabricating the same Electricity 1 Active
US10005659B2 Method for simultaneous structuring and chip singulation Emerging Cross-Sectional Technologies 0 Active
US10461203B2 Semiconductor devices, a fluid sensor and a method for forming a semiconductor device Electricity 0 Active
US11286158B2 MEMS-component Performing Operations; Transporting 0 Active
US10106398B2 Micromechanical structure comprising carbon material and method for fabricating the same Electricity 0 Active
US12235170B2 Sensor and method for detecting guided thermal radiation Physics 0 Active
US11322911B2 Device and method for emitting electromagnetic radiation Physics 0 Active
US10247671B2 Photonic crystal sensor structure and a method for manufacturing the same Physics 0 Active
US11506599B2 Fluid sensor including an optical filter and a waveguide, and method for manufacturing the fluid sensor Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.