Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning

US10256120B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Clinton SAKATA · San Jose, US
• Hui Chen · Burlingame, US
• Jim K. Atkinson · Los Gatos, US
• Brian J. Brown · Eastleigh, GB
• Jianshe Tang · San Jose, US
• Yufei Chen · Gaozhou City, CN
• Yunshuang Ding · Fremont, US

Key dates

• Filing date: Oct 24, 2014
• Grant date: Apr 9, 2019
• Expiry date: Oct 14, 2035

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B08B1/36
• WIPO field: Chemical engineering
• WIPO sector: Chemistry

Abstract

In some embodiments, an apparatus for cleaning a substrate is provided that includes (1) a substrate chuck configured to support a substrate with a front side of the substrate accessible; (2) a buff pad assembly configured to support a buff pad having a diameter smaller than a diameter of the substrate; and (3) a swing arm coupled to the buff pad and configured to position and rotate the buff pad along the front side of the substrate, and control an amount of force applied by the buff pad against the front side of the substrate during cleaning. The substrate chuck, buff pad assembly and swing arm are configured to buff clean the substrate. Numerous additional aspects are disclosed.