Inventor · Burlingame, CA, US

Hui Chen

24Patents
5h-index
44Co-inventors
69Inventor score

Filing activity: Feb 17, 2000 → Oct 27, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6905968B2 Process for selectively etching dielectric layers Electricity 15 Expired
US6569775B1 Method for enhancing plasma processing performance Electricity 11 Expired
US8844546B2 Apparatus and method for cleaning semiconductor substrate using pressurized fluid Electricity 9 Active
US7377002B2 Scrubber box Performing Operations; Transporting 7 Expired
US8968055B2 Methods and apparatus for pre-chemical mechanical planarization buffing module Performing Operations; Transporting 6 Active
US11446711B2 Steam treatment stations for chemical mechanical polishing system Performing Operations; Transporting 5 Active
US7636996B2 Seal installation tool Emerging Cross-Sectional Technologies 2 Active
US8101934B2 Methods and apparatus for detecting a substrate notch or flat Physics 2 Active
US10229842B2 Double sided buff module for post CMP cleaning Electricity 1 Active
US11633833B2 Use of steam for pre-heating of CMP components Performing Operations; Transporting 1 Active
US7774887B2 Scrubber box and methods for using the same Performing Operations; Transporting 1 Active
US11577358B2 Gas entrainment during jetting of fluid for temperature control in chemical mechanical polishing Performing Operations; Transporting 1 Active
US7962990B2 Brush box cleaner module with force control Electricity 1 Active
US11919123B2 Apparatus and method for CMP temperature control Performing Operations; Transporting 0 Active
US9119461B2 High stiffness, anti-slip scrubber brush assembly, high-stiffness mandrel, subassemblies, and assembly methods Electricity 0 Active
US10256120B2 Systems, methods and apparatus for post-chemical mechanical planarization substrate buff pre-cleaning Performing Operations; Transporting 0 Active
US11628478B2 Steam cleaning of CMP components Electricity 0 Active
US9873179B2 Carrier for small pad for chemical mechanical polishing Performing Operations; Transporting 0 Active
US12243761B2 Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging Electricity 0 Active
US11865671B2 Temperature-based in-situ edge assymetry correction during CMP Electricity 0 Active
US12030093B2 Steam treatment stations for chemical mechanical polishing system Performing Operations; Transporting 0 Active
US11697187B2 Temperature-based assymetry correction during CMP and nozzle for media dispensing Electricity 0 Active
US8181302B2 Brush alignment control mechanism Human Necessities 0 Active
US12296427B2 Apparatus and method for CMP temperature control Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.