Patent · US Active

Systems, apparatus, and methods for an improved load port

US10262884B2 · kind B2 · utility

7Cited by

6References

14Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Luke Bonecutter · Cedar Park, US
David Blahnik · Round Rock, US
Paul B. Reuter · Austin, US

Key dates

Filing date	Nov 10, 2016
Grant date	Apr 16, 2019
Priority date	—
Expiry date	May 3, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L21/67778
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.