Multi-zone reactor, system including the reactor, and method of using the same
US10276355B2 · kind B2 · utility
396Cited by
1,222References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2015 |
| Grant date | Apr 30, 2019 |
| Priority date | — |
| Expiry date | Mar 24, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32733
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Multi-zone reactors, systems including a multi-zone reactor, and methods of using the systems and reactors are disclosed. Exemplary multi-zone reactors include a movable susceptor assembly and a moveable plate. The movable susceptor assembly and movable plate can move vertically between reaction zones of a reactor to expose a substrate to multiple processes or reactants.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.