Optical component for use in a radiation source module of a projection exposure system

US10288894B2 · kind B2 · utility

Assignee

• Carl Zeiss SMT GmbH · DE

Inventors

• Michael Patra · Oberkochen, DE
• Alexander Wolf · Oberkochen, DE
• Markus Schwab · Aalen, DE
• Toralf Gruner · Hennef (Sieg), DE
• Joachim Hartjes · Aalen, DE

Key dates

• Filing date: Jun 19, 2017
• Grant date: May 14, 2019
• Expiry date: Aug 11, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G02F1/315
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An optical component for coupling out an individual output beam from a collective output beam includes a plurality of radiation-reflecting regions which are grouped in such a way that regions of the same group serve for guiding different partial beams of the individual output beam to the same scanner.