Passivation of germanium surfaces
US10290505B2 · kind B2 · utility
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17Claims
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Key dates
| Filing date | Aug 12, 2016 |
| Grant date | May 14, 2019 |
| Priority date | — |
| Expiry date | Aug 12, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/762
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Compositions useful for the passivation of germanium-containing materials on a microelectronic device having same thereon.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.