Method and apparatus for direct self assembly in target design and production
US10303835B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 2015 |
| Grant date | May 28, 2019 |
| Priority date | — |
| Expiry date | Apr 25, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24802
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Target designs methods and targets are provided, in which at least some of the differentiation between target elements and their background is carried out by segmenting either of them. Directed self-assembly (DSA) processes are used to generate fine segmentation, and various characteristics of the polymer lines and their guiding lines are used to differentiate target elements from their background. Target designs and design principles are disclosed in relation to the DSA process, as well as optimization of the DSA process to yield high metrology measurement accuracy in face of production inaccuracies. Furthermore, designs and methods are provided for enhancing and using ordered regions of a DSA-produced polymer surface as target elements and as hard masks for production processes. The targets and methods may be configured to enable metrology measurements using polarized light to distinguish target elements or DSA features.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.