Patent · US Active

Method and assembly for determining the carbon content in silicon

US10317338B2 · kind B2 · utility

0Cited by

2References

26Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Naveen Goud Ganagona · Fishkill, US
Moriz Jelinek · Villach, AT
Helmut Oefner · Zorneding, DE
Hans-Joachim Schulze · Taufkirchen, DE
Werner Schustereder · Villach, AT

Key dates

Filing date	Sep 27, 2017
Grant date	Jun 11, 2019
Priority date	—
Expiry date	Sep 27, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/3595
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of determining the carbon content in a silicon sample may include: generating electrically active polyatomic complexes within the silicon sample. Each polyatomic complex may include at least one carbon atom. The method may further include: determining a quantity indicative of the content of the generated polyatomic complexes in the silicon sample, and determining the carbon content in the silicon sample from the determined quantity.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.