Integrative resistive memory in backend metal layers
US10319908B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 3, 2015 |
| Grant date | Jun 11, 2019 |
| Priority date | — |
| Expiry date | Mar 3, 2035 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/85
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Providing for a memory device having a resistive switching memory integrated within backend layers of the memory device is described herein. By way of example, the resistive switching memory can be embedded memory such as cache, random access memory, or the like, in various embodiments. The resistive memory can be fabricated between various backend metallization schemes, including backend copper metal layers and in part utilizing one or more damascene processes. In some embodiments, the resistive memory can be fabricated in part with damascene processes and in part with subtractive etch processing, utilizing four or fewer photo-resist masks. Accordingly, the disclosure provides a relatively low cost, high performance embedded memory compatible with a variety of fabrication processes of integrated circuit foundries.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.