Patent · US Active

Gate and source/drain contact structures positioned above an active region of a transistor device

US10388770B1 · kind B1 · utility

24Cited by
21References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 19, 2018
Grant dateAug 20, 2019
Priority date
Expiry dateMar 19, 2038

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/017
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

One illustrative IC product disclosed herein includes a transistor device including a gate structure positioned above an active region, first and second conductive source/drain structures positioned adjacent opposite sidewalls of the gate structure and an insulating material positioned laterally between the gate structure and each of the first and second conductive source/drain structures. The product also includes first and second air gaps positioned adjacent opposite sidewalls of the gate structure, a gate contact structure that is positioned entirely above the active region and conductively coupled to the gate structure and a source/drain contact structure that is positioned entirely above the active region and conductively coupled to at least one of the first and second conductive source/drain structures.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.