Inventor · Niskayuna, NY, US

Ruilong Xie

1,139Patents
32h-index
295Co-inventors
89Inventor score

Filing activity: Aug 8, 2011 → Oct 25, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10332963B1 Uniformity tuning of variable-height features formed in trenches Electricity 326 Active
US9111907B2 Silicide protection during contact metallization and resulting semiconductor structures Electricity 172 Active
US9412616B1 Methods of forming single and double diffusion breaks on integrated circuit products comprised of FinFET devices and the resulting products Electricity 109 Active
US9947804B1 Methods of forming nanosheet transistor with dielectric isolation of source-drain regions and related structure Electricity 91 Active
US10192867B1 Complementary FETs with wrap around contacts and method of forming same Electricity 82 Active
US9847390B1 Self-aligned wrap-around contacts for nanosheet devices Electricity 57 Active
US9093467B1 Methods of forming gate structures for semiconductor devices using a replacement gate technique and the resulting devices Electricity 55 Active
US9984936B1 Methods of forming an isolated nano-sheet transistor device and the resulting device Electricity 55 Active
US10014390B1 Inner spacer formation for nanosheet field-effect transistors with tall suspensions Electricity 54 Active
US9245885B1 Methods of forming lateral and vertical FinFET devices and the resulting product Electricity 54 Active
US10510620B1 Work function metal patterning for N-P space between active nanostructures Electricity 54 Active
US9991352B1 Methods of forming a nano-sheet transistor device with a thicker gate stack and the resulting device Electricity 54 Active
US9780208B1 Method and structure of forming self-aligned RMG gate for VFET Electricity 49 Active
US9397003B1 Method for forming source/drain contacts during CMOS integration using confined epitaxial growth techniques Electricity 48 Active
US9362181B1 Methods of forming diffusion breaks on integrated circuit products comprised of FinFET devices and the resulting products Electricity 46 Active
US10192819B1 Integrated circuit structure incorporating stacked field effect transistors Electricity 45 Active
US8524592B1 Methods of forming semiconductor devices with self-aligned contacts and low-k spacers and the resulting devices Electricity 44 Active
US10332803B1 Hybrid gate-all-around (GAA) field effect transistor (FET) structure and method of forming Electricity 42 Active
US8703557B1 Methods of removing dummy fin structures when forming finFET devices Electricity 42 Active
US9502518B2 Multi-channel gate-all-around FET Electricity 40 Active
US10256158B1 Insulated epitaxial structures in nanosheet complementary field effect transistors Electricity 39 Active
US9865704B2 Single and double diffusion breaks on integrated circuit products comprised of FinFET devices Electricity 39 Active
US9508604B1 Methods of forming punch through stop regions on FinFET devices on CMOS-based IC products using doped spacers Electricity 38 Active
US9716170B1 Reduced capacitance in vertical transistors by preventing excessive overlap between the gate and the source/drain Electricity 38 Active
US9536982B1 Etch stop for airgap protection Electricity 37 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.