Patent · US Active

Apparatus for analyzing ion kinetics in dielectrics

US10393697B2 · kind B2 · utility

0Cited by

3References

24Claims

0Family size

Assignee

Infineon Technologies AG · DE

Inventors

Sabine Gruber · Pörtschach am Wörther See, AT
Thomas Aichinger · Faak am See, AT
Stefan Krivec · Villach, AT
Thomas Ostermann · Velden am Wörther See, AT

Key dates

Filing date	Nov 2, 2015
Grant date	Aug 27, 2019
Priority date	—
Expiry date	Aug 29, 2036

Classification

Technology area (CPC G)Physics
CPC primaryG01N27/414
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus for analyzing ion kinetics in a dielectric probe structure includes an ion reservoir abutting the dielectric probe structure and configured to supply mobile ions to the dielectric probe structure, a capacitor structure configured to generate an electric field in the dielectric probe structure along a vertical direction, and an electrode structure configured to generate an electrophoretic force on mobile ions in the dielectric probe structure along a lateral direction. A method for analyzing ion kinetics in the dielectric probe structure of the apparatus is also provided.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.