Patent · US Active

Low force wafer test probe

US10444260B2 · kind B2 · utility

0Cited by

12References

23Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

David M. Audette · Webster, US
Dennis R. Conti · South Burlington, US
Marc D. Knox · Mechanicsville, US
Grant Wagner · Jericho, US

Key dates

Filing date	Jul 12, 2016
Grant date	Oct 15, 2019
Priority date	—
Expiry date	Feb 4, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01R1/06733
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe includes a pedestal and at least one feature extending from the pedestal to engage a surface of a corresponding contact at a position offset from a central longitudinal axis of the contact.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.