Systems and methods for using computer-generated models to reduce reflected power towards a high frequency RF generator during a cycle of operations of a low frequency RF generator
US10469108B2 · kind B2 · utility
34Cited by
2References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2016 |
| Grant date | Nov 5, 2019 |
| Priority date | — |
| Expiry date | Jun 3, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04B2001/0491
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
Systems and methods for reducing reflected towards a higher frequency radio frequency (RF) generator during a period of a lower frequency RF generator and for using a relationship to reduce reflected power are described. By tuning the higher frequency RF generator during the period of the lower frequency RF generator, precise control of the higher frequency RF generator is achieved for reducing power reflected towards the higher frequency RF generator. Moreover, by using the relationship to reduce the reflected power, time is saved during processing of a wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.