Asymmetrical magnification inspection system and illumination module
US10481101B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 23, 2017 |
| Grant date | Nov 19, 2019 |
| Priority date | — |
| Expiry date | Aug 30, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0972
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An illumination module that includes a pair of anamorphic prisms that comprises a first anamorphic prism and a second anamorphic prism; wherein the pair of anamorphic prisms is configured to (a) receive a first radiation beam that propagates along a first optical axis, and (b) asymmetrically magnify the first radiation beam to provide a second radiation beam that propagates along a second optical axis that is parallel to the first optical axis; and a rectangular prism that is configured to receive the second radiation beam and perform a lateral shift of the second radiation beam to provide a third radiation beam; and a rotating mechanism that is configured to change an asymmetrical magnification of the pair of anamorphic prisms by rotating at least one of the first anamorphic prism and the second anamorphic prism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.