Beam homogenizer, illumination system and metrology system
US10495889B2 · kind B2 · utility
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21Claims
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Key dates
| Filing date | Feb 22, 2017 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Feb 22, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/0994
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A beam homogenizer for homogenizing a beam of radiation and an illumination system and metrology apparatus comprising such a beam homogenizer as provided. The beam homogenizer comprises a filter system having a controllable radial absorption profile and configured to output a filtered beam and an optical mixing element configured to homogenize the filtered beam. The filter system may be configured to homogenize the angular beam profile radially and said optical mixing element may be configured to homogenize the angular beam profile azimuthally.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.