Patent · US Active

Semiconductor constructions which include metal-containing gate portions and semiconductor-containing gate portions

US10497707B2 · kind B2 · utility

0Cited by
42References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 22, 2017
Grant dateDec 3, 2019
Priority date
Expiry dateOct 30, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/671
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

Some embodiments include a transistor having a first electrically conductive gate portion along a first segment of a channel region and a second electrically conductive gate portion along a second segment of the channel region. The second electrically conductive gate portion is a different composition than the first electrically conductive gate portion. Some embodiments include a method of forming a semiconductor construction. First semiconductor material and metal-containing material are formed over a NAND string. An opening is formed through the metal-containing material and the first semiconductor material, and is lined with gate dielectric. Second semiconductor material is provided within the opening to form a channel region of a transistor. The transistor is a select device electrically coupled to the NAND string.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.