Patent · US Active

Adjustable extended electrode for edge uniformity control

US10504702B2 · kind B2 · utility

12Cited by

45References

20Claims

0Family size

Assignee

Applied Materials, Inc. · US

Inventors

Olivier Luere · Sunnyvale, US
Leonid Dorf · San Jose, US
Rajinder Dhindsa · Pleasanton, US
Sunil Srinivasan · Milpitas, US
Denis M. Koosau · Sunnyvale, US
James Rogers · Milpitas, US

Key dates

Filing date	Jul 3, 2018
Grant date	Dec 10, 2019
Priority date	—
Expiry date	Jul 3, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/334
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Embodiments described herein generally related to a substrate processing apparatus. In one embodiment, a process kit for a substrate processing chamber disclosed herein. The process kit includes an edge ring having a top surface and a bottom surface. An adjustable tuning ring is positioned beneath the bottom surface of the edge ring. The adjustable tuning ring has an upper surface and a lower surface. The lower surface is configured to interface with an actuating mechanism configured to move the adjustable tuning ring relative to the edge ring.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.