Patent · US Active

Gimbal assembly test system and method

US10514393B2 · kind B2 · utility

0Cited by

1References

20Claims

0Family size

Assignee

GlobalFoundries Inc. · KY

Inventors

David L. Gardell · Saint Albans, US
David M. Audette · Webster, US
Peter W. Neff · Stowe, US

Key dates

Filing date	Mar 23, 2018
Grant date	Dec 24, 2019
Priority date	—
Expiry date	Mar 23, 2038

Classification

Technology area (CPC G)Physics
CPC primaryG01R31/44
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Aspects of the present disclosure provide a gimbal assembly test system including: a protective cover affixed to a test surface of a wafer probe card mounted within a gimbal bearing, wherein the protective cover includes an exterior surface oriented outward from the test surface of the wafer probe card; and a recess extending into the exterior surface of the protective cover and shaped to matingly engage a load cell tip therein.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.