Patent · US Active

Charged particle optical apparatus for through-the-lens detection of particles

US10522321B2 · kind B2 · utility

2Cited by

11References

16Claims

0Family size

Assignee

Carl Zeiss Microscopy GmbH · DE

Inventors

Erik Essers · Aalen, DE
Michael Albiez · Aalen, DE
Stefan Meyer · Langensendelbach, DE
Daniel Kirsten · Wulfen, DE
Stewart Bean · St Ives, GB

Key dates

Filing date	Jul 27, 2018
Grant date	Dec 31, 2019
Priority date	—
Expiry date	Jul 27, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2608
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.