High-purity tungsten hexacarbonyl for solid source delivery
US10526697B2 · kind B2 · utility
3Cited by
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18Claims
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Key dates
| Filing date | Feb 28, 2016 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Feb 28, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/448
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A solid source material is described for forming a tungsten-containing film. The solid source material is tungsten hexacarbonyl, wherein content of molybdenum is less than 1000 ppm. Such solid source material may be formed by a process including provision of particulate tungsten hexacarbonyl raw material of particles of size less than 5 mm, wherein particles of size greater than 1.4 mm are less than 15% of the particles, and wherein content of molybdenum is less than 1000 ppm, and sintering the particulate tungsten hexacarbonyl raw material at temperature below 100° C. to produce the solid source material as a sintered solid.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.