Tunable temperature controlled substrate support assembly

US10535544B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Vijay D. Parkhe · San Jose, US
• Steven E. Babayan · Los Altos, US
• Konstantin Makhratchev · Fremont, US
• Zhiqiang Guo · Shandong, CN
• Phillip R. Sommer · Newark, US
• Dan Marohl · San Jose, US

Key dates

• Filing date: Jul 18, 2016
• Grant date: Jan 14, 2020
• Expiry date: Oct 22, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H05B3/02
• WIPO field: Semiconductors
• WIPO sector: Electrical engineering

Abstract

Implementations described herein provide a substrate support assembly which enables both lateral and azimuthal tuning of the heat transfer between an electrostatic chuck and a heating assembly. The substrate support assembly comprises a body having a substrate support surface and a lower surface, one or more main resistive heaters disposed in the body, a plurality of spatially tunable heaters disposed in the body, and a spatially tunable heater controller coupled to the plurality of spatially tunable heaters, the spatially tunable heater controller configured to independently control an output one of the plurality of spatially tunable heaters relative to another of the plurality of spatially tunable heaters.